Thermal and hydrolytic decomposition of metal alkoxides, M(OR)n, is employed to obtain ultra-high-purity submicron-size < 50 nm refractory, ferroelectric, and electro-optic oxide powders. The high surface activity associated with these powders makes possible relatively low temperature processing of the powder compacts to near theoretical density with uniform fine-grain-size bodies. Transmission electron microscopy, high-temperature X-ray, and infrared and Raman spectroscopy are used to observe nucleation, growth, crystallite morphology of the synthesized powder, and microstructural features.